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Technical characteristics:

Model: OPTIV REFERENCE 543/763/10103/543 Dual Z / 763 Dual Z / 10103 Dual Z
Accuracy (μm): Exy: from 0.8 + L / 600

· Various sensors, touch-trigger touch probe, continuous scanning probe and probe changing frame, TTL coaxial laser, CWS confocal white light sensor, precision turntable;

· Flexible optical lens selection: electric zoom lens, patented 2-Step Zoom;

· All granite structure, Y-axis guide rail adopts precision V-shaped dovetail guide rail design;

· REFERENCE series model fixed bridge type, mobile worktable structure;

· Precision ball screw and central drive effectively reduce Abbe error;

· Fixed bridge ultra-high precision 3D compound image measuring system;

· Perfect aerodynamic balance and optimized air bearing distribution;

· Configure industrial grade high-definition black and white CCD camera;

· Coaxial light, transmitted light, multi-section surface ring light;

· Patented dual Z-axis design (DuaZ model);

· HA or UHA high precision models are optional;

· Equipped with PC-DMIS VISION software.